High-precision white light interferometers for non-contact distance and thickness measurements

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The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.


  • Absolute distance measurement with nanometer accuracy
  • Distance-independent thickness measurements
  • Best-in-Class: Resolution < 30 picometers (IMS5600-DS)
  • High signal stability due to new evaluation algorithms and active temperature compensation
  • Large offset distance
  • Simple parameter set up via web interface
  • Industry optimized sensors with robust metal housing and flexible cables
  • Sensors and cables suitable for vacuum

Interferometer for industry and automation

The industrial white light interferometer consists of a robust sensor, a highly flexible sensor cable and a controller in an aluminum housing that can be mounted on a DIN rail. The controller has an active temperature control, which compensates for changes in the ambient temperature and thus achieves an enormous temperature stability. Thanks to its robust design, the interferometer can also be integrated in industrial environments. Cable lengths up to 10 m also allow a spatial separation of sensor and controller. For measurement tasks in clean rooms and in vacuum, vacuum-suitable sensors, cables and cable feed-through accessories are available.

Extreme z resolution and small light spot enable measurements of smallest of details and structures

The interferometer sensors enable a sub-nanometer resolution. In addition, they generate a 10 µm light spot over the entire measuring range. This allows the measurement of small details such as structures on semiconductors and miniaturized electronic components. The light spot is visualized by a pilot laser and facilitates the alignment of the sensor.

Ease of use via web interface

Due to a user-friendly web interface, no additional software is necessary to configure the controller and the sensors. The web interface is accessible via Ethernet connection and enables quick and easy setting of, e.g., averaging, measuring rate and presets.

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. This allows the interferometer to be integrated into all control systems and production programs.