Confocal sensors

Confocal sensors for displacement, distance,
position and thickness


High precision displacement and
thickness measurements


Largest sensor portfolio worldwide


Worldwide fastest measurement
with up to 70 kHz

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The confocal chromatic confocalDT measuring system is used for fast distance and thickness measurements. Different sensor models and controller interfaces open versatile fields of application, e.g., in the semiconductor industry, glass industry, medical engineering and plastics production.


  • Distance and thickness measurements with high resolution and measuring rate
  • Ideal for automation and production control
  • Almost surface-independent, also valid for mirrored and glass surfaces
  • Extremely small and constant spot size
  • Nanometer resolution
  • Industrial-grade controller with ideal signal-to-noise ratio
  • Passive measurement system
  • New: Fastest controller worldwide with integrated light source

High precision displacement and distance measurement on practically all types of surfaces

The confocal chromatic measuring principle enables high precision displacement and distance measurements even on diffuse and reflecting surfaces. Very small objects can be detected due to the small measurement spot size. The axial beam path avoids shadowing effects, enabling measurements even in sleeves and recesses. With the 90° version, geometrical features can be measured inside holes and recesses.

One-sided thickness measurement of transparent materials

The confocal chromatic measuring principle enables thickness measurements of transparent materials such as glass. The thickness value is detected to micrometer accuracy using only a single sensor. The controller provides an editable, expandable materials database. Material-specific parameters such as refractive indexes can be adapted using the web interface. Multi-peak measurements enable the evaluation of up to 6 peaks, which is how multi-layer objects such as laminated glass can be measured.

Ready for vacuum

The confocalDT sensors consist of passive components and do not give off heat. Particularly for use in vacuum applications, Micro-Epsilon offers vacuum-resistant sensors, cables and accessories for different purposes such as clean room, vacuum and even UHV applications..

Fastest measuring rates for dynamic measurement tasks

The confocalDT IFC2471HS controllers offer with 70 kHz the highest measuring rate in the world and are frequently used for dynamic monitoring tasks. In order to adapt the illumination to the respective surface, the controller dynamically regulates the exposure of the CCD line. This exposure control compensates for reflectivity changes of the measurement object much more faster than the conventional light source control. This is how the confocalDT controllers provide outstanding measurement accuracy with high measuring rates and changing surface colors.

Ultra-small light spot detects finest details and structures

Confocal sensors from Micro-Epsilon generate the smallest of light spots <3 µm due to their high Numerical aperture (NA). Therefore, the finest details and structures can be detected reliably.

Extremely large tilt angle

The confocalDT IFS sensors tolerate a large tilt angle up to 48°. Therefore curved and structured surfaces can be detected reliably to generate stable signals.

Controllers with high resolutions and high speeds

The confocalDT controllers provide an excellent signal-to-noise ratio enabling measurements at high accuracy. They are among the fastest controllers worldwide and are frequently used for dynamic monitoring tasks. The fast surface compensation regulates the exposure cycles in order to achieve high signal stability which is particularly favorable when measuring surfaces with varying reflection characteristics. Interfaces are RS422, Ethernet or EtherCAT and AnalogOut.

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options. Materials are stored in an expandable materials database.

Multiple interfaces for easy integration